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Annealing Behaviors of Implanted Lithium Ions in GaN Thin Films Studied by Secondary Ions Mass Spectrometry
Annealing Behaviors of Implanted Lithium Ions in GaN Thin Films Studied by Secondary Ions Mass Spectrometry
2003
Fatma M. Salman
P. Maruska
B. Chai
D. Maronde
Lee Chow
Keywords:
Analytical chemistry
Materials science
Ion
Lithium
Annealing (metallurgy)
Thin film
Mass spectrometry
Correction
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