Artifacts in KPFM in FM, AM and Heterodyne AM Modes

In this paper, the crosstalk in potential measurements caused by the topographic feedback and the resonance frequency in Kelvin probe force microscopy (KPFM) was investigated in frequency modulation (FM), amplitude modulation (AM) and heterodyne amplitude modulation (heterodyne AM) modes. We showed theoretically that the distance-dependence of the modulated electrostatic force in AM-KPFM is significantly weaker than in FM-and heterodyne AM-KPFMs. We experimentally confirmed that the crosstalk in FM-KPFM and heterodyne AM-KPFM is weak than that in AM-KPFM due to the bigger difference of the modulated frequencies in topographic and potential measurements in FM and heterodyne AM-KPFMs. We also compared the corrugations in the local contact potential difference (LCPD) on the surface of Si (001) show that difference on topographic (potential) images is approximately 15 pm (10 mV) between the faulted and unfaulted parts using heterodyne AM-KPFM, on the other hand, this difference cannot be observed using AM-KPFM mode. Original of this was attributed to the low crosstalk between the topographic and the LCPD measurements in heterodyne AM-KPFM.