Fabrication and Characteristics of Micro Platform for Micro Gas Sensor with Low Power Consumption

Abstract A Micro platform for micro gas sensor consisted of micro heater, insulator, and sensing electrode on 2
uNthick SiN x membrane.Three types of micro platforms were designed and fabricated with membrane sizes. Total size of micro platform was 2.6 mm by 2.6 mm.Measured power consumptions were 28 mW, 28 mW, and 32.5 mW for Type 1, Type 2, and Type 3. At this moment, temperatures ofmembranes on the platforms were 295 \C, 297 \C, and 296 \C, respectively. Fabricated micro platform considered appropriate to applyfor low power consumption micro gas sensor. Micro gas sensors were prepared by the sequence that SnO 2 nanopowder pastes weredropped on membrane of Type 1 platforms, dried in oven, heat-treated with micro heaters in platforms. One of the micro gas sensors wastested for gas response to 1157 ppm, 578 ppm, and 231 ppm of methane and 1.68 ppm, 0.84 ppm, and 0.42 ppm of NO 2 . Keywords : MEMS, Micro Gas Sensor, Micro Platform, Low Power Consumption 
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