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Dry etching of strain gauge thin films for oil less pressure sensor using Neutral Loop Discharge Plasma
Dry etching of strain gauge thin films for oil less pressure sensor using Neutral Loop Discharge Plasma
2018
Kazuo Satoh
Yoshiharu Kakehi
Yusuke Kanaoka
Taizo Oguri
Yusuke Kondo
Yoshiharu Yamada
Keywords:
Dry etching
Thin film
Plasma
Strain gauge
Composite material
Pressure sensor
Materials science
Correction
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