Steering operation of optical beam scanner with semiconductor waveguides

An optical beam scanner which is capable of high speed random steering has been fabricated. The device consists of two AlGaAs/AlGaAs rib waveguides prepared on a GaAs substrate. The deflection angle obtained was 3.2° by applying a reverse bias of 9 V to the pn junction in one of the waveguides. This angle almost agrees with the value designed.