Effects of Laser Treatment for the Pb(Zr, Ti)O3/(La, Sr)MnO3 Heterostructure Prepared onto the Stainless Steel Substrate

Amorphous multifilm—Pb(Zr,Ti)O 3 (PZT)/(La, Sr)MnO 3 (LSMO)—prepared onto stainless-steel substrates can be greatly improved using the CO 2 laser annealing technique. The conductive thin film LSMO of 200 nm is sputtered onto a standard industrial stainless steel (SUS430) substrate as a buffer layer, effectively improving the adhesion and prohibiting the interdiffusion of chrome and manganese atoms from stainless steel substrate. As the experimental results show, the LSMO and PZT thin films treated in a two-stage sequential process by CO 2 laser exhibit better crystallinity and electric properties than the PZT/LSMO heterostructure treated by one-shot laser annealing due to heat conduction. The mechanisms of the crystallinity and the electric properties are systematically studied in this report.