Low Dielectric Acrylate Resin as Passivation Layer on TFT-LCD

A low dielectric material, acrylate resin has been investigated as a passivationdielectric layer for thin-film transistor (TFT) arrays in this paper. Compared with the conventional nitride film (SiNx, e≈7), the acrylate resin passivation layer exhibits a flat surfaceand a low dielectric constant (e≈4.5) which lowers the RC delay in a device. The hightransmittance and good planarization characteristics of the low dielectric acrylate resin filmenhance the brightness and aperture ratio of thin film transistors liquid crystal displays (TFT-LCDs), and lower the manufacture cost.