High-Sensitivity Inertial Sensor Module to Measure Hidden Micro Muscular Sounds

This paper reports a high-sensitivity inertial sensor module to obtain hidden micro muscular sounds. A microelectromechanical systems (MEMS) accelerometer with a gold proof mass is used to minimize the sensor noise. The sensor module is designed for the measurement of physical vibration. The noise floor of the developed module is found to be around 10 dB lower than that of a commercial one. Experimental results of forefinger vibration measurements confirm that the module has successfully captured the target signal at the frequency range of muscular sounds, which is buried in the noise of conventional measurements.