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The charged particle beam device and a charged particle beam irradiation method
The charged particle beam device and a charged particle beam irradiation method
2003
satou mitugu
takasi toi
youiti oze
hideo ko tokoro
makoto ezumi
noriaki arai
Keywords:
Ion beam
Atomic physics
Particle radiation
Irradiation
Particle beam
Charged particle beam
Materials science
Correction
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