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An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode.
An Electrostatic MEMS Roll-Pitch Rotation Rate Sensor with In-Plane Drive Mode.
2022
Ahmed Khaled
Ahmed M. Salman
Ridha S. Almikhlafi
Radwan M. Noor
Yasser Mohammad Seddiq
Mostafa Soliman
Mohamed A. E. Mahmoud
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