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A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h.
A MEMS Coriolis-Based Mass-Flow-to-Digital Converter with 100µg/h/√Hz Noise i Floor and Zero Stability of ±0.35mg/h.
2022
Arthur C. de Oliveira
Sining Pan
Kofi A. A. Makinwa
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