A tool for the spectroscopic investigation of hydrogen–silicon interaction

The preparation of an array of nanocavities (NCs) in silicon via thermal treatments of high-fluence helium-implanted silicon is a well-established process. The NCs have offered a powerful tool for the preparation of well-defined and ordered internal silicon surface, enabling the experimental investigation of its free energy. Here, instead, we interpret the NCs as an ideal nanolaboratory for the study of the adsorption and desorption of H2 on silicon. We will present the determination of the internal pressure through the equilibrium abundances of monohydride dimers and dihydrides obtained with infrared spectroscopy. Copyright © 2010 John Wiley & Sons, Ltd.