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A diffusion kinetic model for epitaxial growth of gallium arsenide layers from the gas phase
A diffusion kinetic model for epitaxial growth of gallium arsenide layers from the gas phase
1985
Emerich Erdös
Petr Voňka
Josef Stejskal
PŘEmysl Klíma
Keywords:
Crystal growth
Thin film
Epitaxy
Gallium arsenide
Inorganic compound
Organic chemistry
Inorganic chemistry
Chemistry
gas phase
kinetic model
Correction
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