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H2O Diffusion Barriers at Si-Si Direct Bonding Interfaces for Low Temperature Anneals
H2O Diffusion Barriers at Si-Si Direct Bonding Interfaces for Low Temperature Anneals
2011
H. Moriceau
F. Rieutord
L. Libralesso
C. Ventosa
Frank Fournel
Christophe Morales
T. Mc Cormick
T. Chevolleau
Ionut Radu
Keywords:
Direct bonding
Chemistry
Inorganic chemistry
Chemical engineering
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