Local atomic structure of the GaN-side of the Al2O3/GaN interface revealed by X-ray absorption spectroscopy

Abstract The interface between a gate insulator (Al2O3) and a semiconductor (GaN) was investigated via surface-sensitive Ga K-edge extended X-ray absorption fine structure spectroscopy, achieved by detecting the Ga LMM Auger electrons originated from the Ga K-shell absorption. This GaN-side interface study was conducted on Al2O3 thin films formed via atomic layer deposition. The determined atomic structures revealed GaN crystalline changes and the formation of Ga–O bonds due to nitrogen annealing.