Laser micromachining techniques for industrial MEMS applications

Pulsed laser sources are widely used for the micro-processing of materials from the structuring and patterning of surfaces to the direct machining of devices. This paper discusses laser micro-processing techniques for the fabrication of microstructures with high accuracy and precision. Techniques discussed include laser mask projection techniques and direct beam micromachining using galvo-scanners and high precision motion stages, with a variety of different lasers. Examples of the application of these techniques to the manufacture of MEMS and MOEMS devices are discussed.