Miniature tilting mechanism using piezoelectric actuators

A tilting mechanism using piezoelectric actuators which has two rotation degrees of freedom has been developed. The dimensions of the body of the tilting mechanism are 10 mm in diameter and 24 mm in length. We have achieved the following specifications of the tilting mechanism; +/- 20 degree(s) rotational angle in the orthogonal two axes, 30 seconds of the angular resolution, 10 degree(s)/sec of the maximum rotation speed, and 1.75 Nmm of the maximum torque. This paper describes the structure and the experimental results of the linear actuator and the tilting mechanism.© (1995) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.