IC MEMS microtransducers

H. Baltes,O. Paul,Jan G. Korvink,M. Schneider,J. Bühler,N. Schneeberger,D. Jaeggi,Piero Malcovati,M Hornung,M. Von Arx,E. Mayer,J. Funk

IC MEMS microtransducers

1996

H. Baltes
O. Paul
Jan G. Korvink
M. Schneider
J. Bühler
N. Schneeberger
D. Jaeggi
Piero Malcovati
M Hornung
M. Von Arx
E. Mayer
J. Funk

This invited review of the merging of MEMS and IC technology includes a summary of the current technological approaches to IC MEMS, illustrations by selected IC MEMS microtransducer demonstrators, an outline of the MEMS CAD tools SOLIDIS and ICMAT, and a critical evaluation.

Keywords:

CMOS
Integrated circuit design
Surface micromachining
Merge (version control)
Electronic engineering
Physics
Microelectromechanical systems
cad tools
Electrical engineering

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