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Flux-balance control for the selective etching of dielectric materials
Flux-balance control for the selective etching of dielectric materials
2001
Tetsuya Tatsumi
Keywords:
Soft X-ray emission spectroscopy
Flux
Instrumental chemistry
Dielectric
Reactive-ion etching
Time-resolved spectroscopy
Etching
X-ray photoelectron spectroscopy
Analytical chemistry
Chemistry
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