A low voltage silicon micro-pump based on piezoelectric thin films

Abstract We fabricated a functional micro-pump made of silicon and PZT thin films with standard MEMS technology. This pump can self-prime, works in both ways and pumps both air and water. Typical figures in water are 3.5 μL/min-flow rate at 1 Hz, no downstream pressure and 24 V-actuation voltage. At this voltage, the micro-pump valves withstand 32 mbar downstream pressure. The main advantage of this micro-pump based on piezoelectric films compared to its bulk counterparts is that it allows for low voltage operation. Less than 50 μW are needed to actuate the pump membranes at 1 Hz.