A large area reconfigurable MOEMS microshutter array for coded aperture imaging systems

Coded aperture imaging has been used for astronomical applications for several years. Typical implementations used a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. Recently applications have emerged in the visible and infra red bands for low cost lens-less imaging systems and system studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene - requiring a reconfigurable mask. Previously we reported on the early feasibility of realising such a mask based on polysilicon micr-opto-electromechanical systems (MOEMS) technology and early results in the visible and near IR bands. This employs interference effects to modulate incident light - achieved by tuning a large array of asymmetric Fabry-Perot optical cavities via an applied voltage whilst a hysteretic row/column addressing scheme is used to control the state of individual elements. In this paper we present transmission results from the target mid-IR band (3-5μm), compare them with theory and describe the scale up from a 3x3 proof-of-concept MOEMS microshutter array to a 560 x 560 element array (2cm x 2cm chip) with the associated driver electronics and embedded control - including aspects of electronic design, addressing control and integration. The resultant microsystem represents a core building block to realise much larger reconfigurable masks using a tiled approach with further integration challenges in the future.