Spray-pyrolysis deposition of LaMnO3 and La1−xCaxMnO3 thin films

Abstract Ethylene glycol solutions of La–Mn(II) and La–Ca–Mn(II) citric complexes has been used as a starting material for spray-pyrolysis deposition of LaMnO 3 and La 1− x Ca x MnO 3 thin films on β-quartz, fused quartz, Si(0 0 1) and SrTiO 3 (1 0 0) substrates heated during the deposition at 380 °C. At suitable post-deposition heating conditions highly uniform films, 0.1–1 μm in thickness, with good crystal structure were obtained. Highly textured LaMnO 3 films are obtained on SrTiO 3 (1 0 0) substrate. Interaction between the layer and Si-containing substrates is observed during the post-deposition heating in static air.