The substrate support system

PROBLEM TO BE SOLVED: To provide a substrate support system including a substrate support which allows for heating of a substrate while supporting, without hindering the optical path of light used in the positioning of a chip for the substrate.SOLUTION: In a substrate support system having an optical system for positioning a chip at a predetermined position on a substrate WA by image recognition, and substrate side heating means for heating the substrate while supporting on a substrate supporting surface 501, the optical system includes a light-emitting device and a light-receiving device configured so that light is propagated while transmitting through at least the substrate side heating means in a direction substantially perpendicular to the substrate supporting surface, and an image recognition device for measuring a relative positional error of the chip and substrate, by recognizing a chip side mark put on the chip and a substrate side mark put on the substrate. The substrate side heating means includes a first transparent insulation layer 504 having the substrate supporting surface and a heater surface 502 on the front and back, and a transparent conductive layer 503 provided on the heater surface of the first transparent insulation layer and generating heat by electrification.