Metal Oxyfluoride Coatings For Energy-Efficient Windows

1989 
Indium-tin-oxyfluoride films were made by dc magnetron sputtering in Ar + 0 2 + CF 4 at a rate of 1.2 nms -1 . A wide-bandgap material, with refractive index ~1.5 and good durability, was produced. It is very well suited for antireflecting indium-tin-oxide coatings. Vanadium-oxyfluoride films were made by rf magnetron sputtering in Ar + 0 2 + CF 4 . Thermo-chromism was studied by electrical and spectral optical measurements. Fluorination was found to yield a significant decrease of the luminous absorptance.
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