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Effect of hydrogen on the structure of cerium films obtained by magnetron sputtering onto semiconductor substrates
Effect of hydrogen on the structure of cerium films obtained by magnetron sputtering onto semiconductor substrates
2020
V.N. Verbetsky
S.V. Mitrokhin
G. A. Badun
S.A. Evlashin
A. A. Tepanov
V. A. Bunyaev
Keywords:
Semiconductor
Sputter deposition
Materials science
Metallurgy
Cerium
Hydrogen
Correction
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