Low-Temperature VUV-Stimulated MO CVD Process of Palladium Layer Deposition

palladium layer deposition Boris M. Kuchumov, Tat’yana P. Koretskaya, Yuriy V. Shevtsov, Sergey V. Trubin, Galina I. Zharkova, Vladimir S. Danilovich, Igor K. Igumenov, Vladimir N. Kruchinin* Nikolaev Institute of Inorganic Chemistry of Siberian Branch of Russian Academy of Sciences Lavrentiev ave. 3, Novosibirsk, 630090, Russia *Rzhanov Institute of Semiconductor Physics of Siberian Branch of Russian Academy of Sciences Lavrentiev ave. 13, Novosibirsk, 630090, Russia