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New Charge Control Technology by Stencil Mask Ion Implantation
New Charge Control Technology by Stencil Mask Ion Implantation
2001
Takeshi Shibata
Kyoichi Suguro
Kazuyoshi Sugihara
Katsuya Okumura
Tsutomu Nishihashi
K. Kashimoto
Junki Fujiyama
Yuzo Sakurada
Keywords:
Ion implantation
Nanotechnology
Stencil
Charge control
Electronic engineering
Materials science
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