Surface Acoustic Wave Motor with Feed Back Controller Considering Dead Zone

Potential of surface acoustic wave (SAW) motor has been investigated during the past decade. A substrate of 128 degrees y-rotated lithium niobate was used for a stator of a SAW motor. Interdigital transducer (IDT) electrodes were fabricated by the vacuum evaporation and the lithography. These processes are familiar for SAW device fabrication and also MEMS field. Material of slider is now silicon substrate for the processes of lithograph and dry etching to fabricate surface texture. Up to now, several typical performances have been measured at several operating conditions and several kinds of SAW motors by the authors. In this paper, we tried feed back control by introducing a nonlinear function which compensates the motor response.