Old Web
English
Sign In
Acemap
>
Paper
>
Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
Multi-shots ELA of sputtered Si film and TFT with metal source-drain structure
2016
Taisei Harada
Futa Gakiya
Takuya Ashitomi
Tatsuya Okada
Takashi Noguchi
Kanji Noda
Akira Suwa
Hiroshi Ikenoue
Tetsuo Okuyama
Keywords:
Thin-film transistor
Electronic engineering
Materials science
Metal
Optoelectronics
excimer laser annealing
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]