Design and Simulation Analysis of Membrane Based Mems Piezoresistive Pressure Sensor for Intracranial Pressure Measurements

In this paper, need to achieve high sensible pressure measurements by designing and analyzing a piezoresistive sensor with different materials. Bio-MEMS are being used for biomedical applications by their scaling mechanisms. This structure mainly focuses on systematic analysis of measuring intracranial pressure (ICP), rectangular membrane based piezoresistive pressure sensor is simple and very precise for measuring pressure. The diaphragm thickness and different material properties are important in analyzing the sensitivity performance of the sensor. The designed pressure sensor for measuring pressures in the range of 1 to 40 mmHg range of intracranial pressure sensors. The piezoresistor is placed on maximum stress area of the rectangular membrane, which gives very sensitive linear results to applied pressure. The simulation results of rectangular membrane structure were obtained in a high sensitivity of 4.49(mV/kPa). The sensing outputs of the design and displacement of the membrane were determined through simulations using COMSOL Multiphysics.