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Research of Properties of a Carbon Film Formed in Methane Plasma and the Following Annealing
Research of Properties of a Carbon Film Formed in Methane Plasma and the Following Annealing
2021
E.P. Neustroev
A R Prokopyev
S. O. Semenov
V. I. Popov
F. F. Protopopov
A. S. Andreev
N. A. Savvinova
E. S. Lukin
Keywords:
Plasma
Carbon film
Chemical engineering
Methane
annealing
Materials science
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