Force and heat synchronous loading device for in-situ detection of scanning acoustic microscope
2014
The invention discloses a force and heat synchronous loading device for in-situ detection of a scanning acoustic microscope. The force and heat synchronous loading device comprises a base and a medium groove (1) formed in the base. The force and heat synchronous loading device is characterized by further comprising a force loading device and a heat loading device, wherein the force loading device comprises a fixed bent beam (7), a movable bent beam (2) and a driving mechanism for driving the movable bent beam (2) to move from left to right; the fixed bent beam (7) is fixedly arranged on the base; the movable bent beam (2) is connected with the driving mechanism and is driven by the driving mechanism to move along the medium groove (1) from left to right; the fixed bent beam (7) and the movable bent beam (2) are provided with clamp heads (3) which correspond to each other; the heat loading device comprises an electric heater (10) and a semiconductor refrigerator (11) which are arranged on the medium groove (1). The force and heat synchronous loading device is simple in structure and low in cost; the force and heat synchronous loading of a test piece can also be realized so that the force and heat synchronous loading device is suitable for popularization and utilization.
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