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Energy Analyses of Substrate-incident Ion on TiO2 Deposition by RF Magnetron Sputtering.
Energy Analyses of Substrate-incident Ion on TiO2 Deposition by RF Magnetron Sputtering.
1996
Okimura Kunio
Maeda Naohiro
Shibata Akira
Keywords:
Energy (signal processing)
Substrate (electronics)
Optoelectronics
Materials science
Deposition (chemistry)
Ion
Sputter deposition
Correction
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