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Ceramic Green Tape Structuring for the Fabrication of Microsystems Based on Multilayer Technology
Ceramic Green Tape Structuring for the Fabrication of Microsystems Based on Multilayer Technology
2011
Gunter Hagen
T. Kopp
Uwe Partsch
Keywords:
Nanotechnology
Ceramic
Fabrication
Microsystem
Materials science
Structuring
green tape
Correction
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