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Effects of Small Amount of Impurities on Etching of Silicon
Effects of Small Amount of Impurities on Etching of Silicon
2000
Hiroshi Tanaka
Kazuyuki Inoue
Keywords:
Metallurgy
Materials science
Surface roughness
Dry etching
Etching (microfabrication)
Isotropic etching
Impurity
Reactive-ion etching
Etching
Silicon
Correction
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