Design and implementation of a custom built variable temperature stage for a secondary ion mass spectrometer

The authors have built, designed, and implemented a variable temperature stage for a Cameca IMS 7f-GEO with an achievable temperature range of −150 to 300 °C and designed a new sample holder for rapid thermal stabilization. This paper focuses on the design and implementation aspects of the variable temperature stage in detail. The authors demonstrate applications where temperature control is useful for analyses that are not possible at room temperature.