MEMS calorimetric shear-stress sensor based on flexible substrate

A new type of MEMS calorimetric shear-stress sensor based on flexible substrate is presented. The sensor is composed of three metal wires deposed directly on polyimide (kapton) substrate, which allow to measure the shear-stress and flow direction on curved surfaces for aerodynamic applications. This paper presents the function principle of the sensor, its manufacturing process on flexible substrate, and the first characterizations of this new calorimetric sensor.