Development of MEMS VOA with only One Shutter for Dual Signals Simultaneous Operation

A MEMS variable optical attenuator (VOA) with only one shutter for dual signals simultaneous operation is designed for advanced tuning functions. Theoretical electro-mechanism model has also been developed to provide optimization for the VOA design. In experiment, the fabricated VOA device has demonstrated a over 40-dB attenuation range with respect to the driving voltage of one shutter, and it has also realized low polarization-dependent performance. The superior specifications make this device very promising for optical network systems and laboratory equipment.