Secondary electron emission characteristic of nanocrystalline diamond films

The preparation, characterization and application of nanocrystalline diamond films have become a new “hot point” in the development of diamond films prepared by chemical vapor deposition. In this paper, we simply introduced the preparation process of nano-crystalline diamond films with MPCVD method, and the result of surface analysis. Then we designed an experiment device to measure the SEE coefficient(δ) in emission mode. A good result (δ =15) has been obtained.