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Thin silicide films: producing and properties
Thin silicide films: producing and properties
2004
A. S. Rysbaev
S. S. Nasriddinov
Yu. Yu. Yuldashev
Sh.H. Djuraev
A.M. Rahimov
N. Shaymanova
F.A. Mirzaeva
Keywords:
Optoelectronics
Crystallographic defect
Electron spectroscopy
Ion implantation
Auger electron spectroscopy
Thin film
Silicide
Annealing (metallurgy)
Electron diffraction
Materials science
Correction
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