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Factors for determination of deposition rate of oxide films during CVD process under air atmosphere
Factors for determination of deposition rate of oxide films during CVD process under air atmosphere
2006
Shinnosuke Kawaguchi
Kei-ichi Namiki
Shigeo Ohshio
Junichi Nishino
Hidetoshi Saitoh
Keywords:
Oxide
Ion plating
Atmosphere
Combustion chemical vapor deposition
Carbon film
Materials science
Inorganic chemistry
air atmosphere
Chemical engineering
deposition rate
Correction
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