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Developments in Hybrid Orientation Technology by Electron Beam Induced Orientation Selective Epitaxial Growth
Developments in Hybrid Orientation Technology by Electron Beam Induced Orientation Selective Epitaxial Growth
2015
Tomoyasu Inoue
Shigenari Shida
Keywords:
Cathode ray
Silicon on insulator
Epitaxy
Optoelectronics
Materials science
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