Preparation and intermediates acrylate derivatives and methods for their preparation

2013 
Upon one of the units of the polymer to be contained in the photoresist composition, excellent lithography properties such as LWR, a method of manufacturing a high resolution capable of becoming novel acrylic acid ester derivatives, intermediates and a method of manufacturing said derivative . Specifically, the compound 3 and an aldehyde are reacted in the presence of an acid to give the compound 2, followed by the production of acrylic acid ester derivative 1 by reacting acrylic acid-based compound.
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