Studies on the Microstructure and Properties of TiO2/(Ag) Thin Films

TiO2/(Ag) thin films were prepared by DC magnetron sputtering. The effects of Ag-doping on the microstructure and properties were compared studied by atomic force microscopy (AFM), X-ray diffraction (XRD), UV-Vis spectra and photocatalysis tesing, respectively. The results show that when doped with Ag, the surface of TiO2 thin film was improved and the growth of anatase phase was promoted. The absoption properties of Ag-doped TiO2 thin film was enhanced dramatically compared with that of TiO2 thin film. And the photocatalysis properties of Ag-doped TiO2 thin film was increased twice as well.