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SOI/Bulk Hybrid Wafer Process Using SEG (Selective Epitaxial Growth) Technique for High-End SoC Applications
SOI/Bulk Hybrid Wafer Process Using SEG (Selective Epitaxial Growth) Technique for High-End SoC Applications
2002
Hajime Nagano
Tsutomu Sato
Kiyotaka Miyano
Takashi Yamada
Ichiro Mizushima
Keywords:
Silicon on insulator
Epitaxy
Electronic engineering
Wafer
Materials science
Optoelectronics
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