Surface microstructures of ZnO coated SnO2: F films

Abstract ZnO films of 100 A thick were coated on textured SnO 2 : F films using DC magnetron sputtering to improve hydrogen plasma durability. The surface microstructure and the plasma durability of the films were investigated using a scanning electron microscope (SEM), reflection high energy electron diffraction (RHEED) and optical measurements. It was found that the ZnO coated films exhibited high durability against hydrogen plasma. The well ordered microstructure of ZnO was considered to act as a good barrier against hydrogen diffusion into the SnO 2 : F films.