Multiparameter sensor based on a multi-interferometric serial configuration for temperature and strain measurements
2021
In this work, a multi-parameter point sensor based on the combination of Fabry-Perot (FP) and the anti-resonant (AR) reflecting guidance in cascade configuration is proposed and experimentally demonstrated. This structure, based on FP interference and AR reflecting guidance, was fabricated with two different air micro-cavities. The attained experimental results showed different strain and temperature sensitivities for the antiresonance contribution. However, when analyzing the FP interference, only strain sensitivity was observed, demonstrating that this air micro-cavity was also insensitive to temperature variations.
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