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Low Temperature Deposition of Inorganic Thin Films by Ultraviolet Laser-Assisted Chemical Vapor Deposition
Low Temperature Deposition of Inorganic Thin Films by Ultraviolet Laser-Assisted Chemical Vapor Deposition
2016
Kuk Seungkuk
Park Jongmin
Zhang Tao
Lee Ho-Nyun
Cho Kwan Hyun
Kang Kyung-Tae
J Hwang David
Keywords:
Thin film
Inorganic chemistry
Ion plating
Hybrid physical-chemical vapor deposition
Materials science
Deposition (phase transition)
Carbon film
Combustion chemical vapor deposition
Electron beam physical vapor deposition
Pulsed laser deposition
Plasma-enhanced chemical vapor deposition
Chemical engineering
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