Proof of Concept: Glass-Membrane Based Differential Pressure Sensor

As an alternative to silicon membranes, a pressure sensor concept based on glass-membranes was developed, mono-lithically manufactured, and evaluated. Pt strain gauge structures of two geometries were fabricated on circular and square glass membranes, realized using the Laser Induced Deep Etching (LIDE) technology. The basal resistivity, the offset voltage, and pressure and temperature dependencies were measured. The designs exhibited linear behavior in the tested regimes and high sensitivity. A discussion of the results and classification regarding the use of glass as a substrate draws the conclusion that the LIDE technology is well suited to manufacture mechanically loaded, monolithic glass-based MEMS without process-related substrate damage.