Effects of nonequilibrium atmospheric-pressure O2 plasma-assisted annealing on anatase TiO2 nanoparticles

Abstract Anatase TiO2 nanoparticles (NPs) immobilized on glass substrates were annealed with the assistance of nonequilibrium atmospheric-pressure O2 plasma. The plasma-assisted annealing greatly enhanced the photodecomposition and photobactericidal activity as compared with electric-furnace annealing. The plasma-assisted annealing reduced the TiO2 NP agglomerate size and increased the optical absorption, the photoinduced electrical conductivity, the amounts of bridging and terminal oxygen groups, and the (1 1 2)/(1 0 1) plane intensity ratio, causing the lattice oxygen deficiency that formed partially Ti-rich surface portions. The enhanced photobactericidal activity would arise from the bridging and terminal oxygen groups. The enhanced photodecomposition would arise from the increased concentration of photogenerated carriers due to the following three factors. The first is the optical absorption increased by the agglomerate size reduction and the (1 1 2) plane growth or appearance, which exert scattering more incident photons. The second is the charge separation of photogenerated carriers facilitated by the bridging and terminal oxygen groups, which originate from oxygen vacancies via oxygen ion impact from the plasma. The third is the charge transfer of plasmon-excited electrons from the partially Ti-rich portions to TiO2. The enhanced photodecomposition would also arise from more reactive oxygen species generated from the bridging and terminal oxygen groups by the photogenerated carriers.